CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology
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چکیده
منابع مشابه
CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology
This work demonstrates the feasibility to obtain copper nanoelectromechanical (NEMS) relays using a commercial complementary metal oxide semiconductor (CMOS) technology (ST 65 nm) following an intra CMOS-MEMS approach. We report experimental demonstration of contact-mode nano-electromechanical switches obtaining low operating voltage (5.5 V), good ION/IOFF (103) ratio, abrupt subthreshold swing...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2016
ISSN: 2072-666X
DOI: 10.3390/mi7020030